Author: Lin Yeou-Yih
Publisher: Taylor & Francis Ltd
ISSN: 1042-6914
Source: Materials and Manufacturing Processes, Vol.22, Iss.7, 2007-09, pp. : 871-878
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Hydrodynamic analysis of chemical mechanical polishing process
By Park S.-S. Cho C.-H. Ahn Y.
Tribology International, Vol. 33, Iss. 10, 2000-10 ,pp. :