Preparation and ferroelectric properties of lead zirconate titanate thin films by RF magnetron sputtering

Author： Lu D. X. Wong E. M. W. Pun E. Y. B. Chung P. S. Liu J. S. Lee Z. Y.

ISSN： 1362-3060

Source： International Journal of Electronics, Vol.83, Iss.6, 1997-12, pp. : 805-816

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