Compositional and structural properties of deuterated plasma enhanced chemical vapour deposited silicon-carbon alloys

Author： Calcagno L.   Giorgis F.   Makthari A.   Musumeci P.   Pirri F.  

Publisher： Taylor & Francis Ltd

ISSN： 1463-6417

Source： Philosophical Magazine B, Vol.79, Iss.10, 1999-10, pp. : 1685-1694

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