Author： Bogue Robert
Publisher： Emerald Group Publishing Ltd
ISSN： 0144-5154
Source： Assembly Automation, Vol.29, Iss.4, 2009-09, pp. : 313-320
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Abstract
Purpose ‐ The purpose of this paper is to provide a technical review of silicon micro-electromechanical systems (MEMS) technology and its applications. Design/methodology/approach ‐ Following an introduction, the paper describes silicon MEMS fabrication and assembly techniques, considers a selection of commercially important products and their applications and concludes with a brief review of power MEMS research. Findings ‐ Silicon MEMS fabrication technology is derived from techniques used in semiconductor manufacture and has yielded a diverse and ever-growing range of sensors, actuators and other miniaturised devices that find applications in a multitude of industries. Originality/value ‐ This paper provides a detailed technical review of MEMS technology and its applications.
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