Finite element method based absolute pressure sensitivity optimized membrane type double cavity vacuum sealed piezoresistive sensor

Author: Rathore Pradeep Kumar   Varshney Pratyush   Prasad Sunil   Panwar B.S.  

Publisher: Emerald Group Publishing Ltd

ISSN: 0260-2288

Source: Sensor Review, Vol.33, Iss.4, 2013-09, pp. : 352-362

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