Anomalous electron-beam-induced excitation of argon in pulsed supersonic streams of Ar+CH₄, Ar+SiH₄, and Ar+ CH₄+SiH₄ mixtures

By Madirbaev V.   Zarvin A.   Korobeishchikov N.   Sharafutdinov R.  

Technical Physics Letters, Vol. 27, Iss. 10, 2001-10 ,pp. : 819-820

MAIK Nauka/Interperiodica

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Energy distributions of H and H₂ in a Ar–SiH₄–H₂ plasma during transition from a-Si to nc-Si film deposition

By Moiseev T  

Plasma Sources Science and Technology, Vol. 20, Iss. 2, 2011-04 ,pp. : 25007-25016

IOP Publishing

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Effect of glow DBD modulation on gas and thin film chemical composition: case of Ar/SiH₄/NH₃ mixture

By Vallade Julien   Bazinette Remy   Gaudy Laura   Massines Françoise  

Journal of Physics D: Applied Physics, Vol. 47, Iss. 22, 2014-06 ,pp. : 224006-224015

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Far-Infrared Rotational Spectrum of ArD⁺

By Odashima H.   Kozato A.   Matsushima F.   Tsunekawa S.   Takagi K.  

Journal of Molecular Spectroscopy, Vol. 195, Iss. 2, 1999-06 ,pp. : 356-359

Academic Press

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Optical characteristics of the plasma of a transverse volume discharge in a Ne/Ar/SiH₄ mixture

By Shuaibov A.  

Plasma Physics Reports, Vol. 26, Iss. 2, 2000-02 ,pp. : 174-176

MAIK Nauka/Interperiodica

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