Low noise field-effect transistor for integrated strain sensing in microelectromechanical systems at 77 K

Author: Beck R.G.   Eriksson M.A.   Westervelt R.M.   Campman K.L.   Gossard A.C.  

Publisher: Academic Press

ISSN: 0749-6036

Source: Superlattices and Microstructures, Vol.20, Iss.3, 1996-10, pp. : 363-367

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Abstract