Induced defects in a-Si:H/a-SiNx:H multilayers by use of EMT and PAT

Author: Gu W.Z.   Wang Z.C.   Sun M.X.  

Publisher: Academic Press

ISSN: 0749-6036

Source: Superlattices and Microstructures, Vol.23, Iss.5, 1998-05, pp. : 991-997

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Abstract