Impact of thermal annealing on interfacial layer and electrical properties of a-SiN_x : H/Si

Author： Singh Sarab Preet Vijaya Prakash G. Ghosh S. Rai Sanjay Srivastava P.

E-ISSN： 1286-4854|90|2|26002-26002

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.90, Iss.2, 2010-05, pp. : 26002-26002

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