Dynamic Tuning of Transmission Wavelength of MEMS-Based Ge Waveguides on a Si Beam

By Hirase Masashi   Nguyen Luan M.   Fukuda Hiroshi   Ishikawa Yasuhiko   Wada Kazumi  

Photonics, Vol. 3, Iss. 2, 2016-03 ,pp. : 14-14

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Microfabrication influence on the behavior of capacitive type MEMS sensors and actuators

By Packirisamy Muthukumaran  

Sensor Review, Vol. 26, Iss. 1, 2006-01 ,pp. : 58-65

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Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

By Chollet Franck  

Micromachines, Vol. 7, Iss. 2, 2016-01 ,pp. : 18-18

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Passivity-based robust control of systems with redundant sensors and actuators

By Joshi S. M.   Kelkar A. G.  

International Journal of Control, Vol. 74, Iss. 5, 2001-03 ,pp. : 474-481

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Wearable Pulse Wave Monitoring System Based on MEMS Sensors

By Sun Yu   Dong Ying   Gao Ruyi   Chu Yao   Zhang Min   Qian Xiang   Wang Xiaohao  

Micromachines, Vol. 9, Iss. 2, 2018-02 ,pp. : 90-90

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