Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine

Author: Liu Van-Tsai   Liu Chien-Hung   Li Hau-Wei   Chen Chieh-Li   Lin Chun-Liang   Lin Yu-Chen  

Publisher: Emerald Group Publishing Ltd

ISSN: 0368-492X

Source: Kybernetes: The International Journal of Systems & Cybernetics, Vol.39, Iss.6, 2010-01, pp. : 1029-1039

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Abstract