Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine

Author： Liu Van-Tsai Liu Chien-Hung Li Hau-Wei Chen Chieh-Li Lin Chun-Liang Lin Yu-Chen

ISSN： 0368-492X

Source： Kybernetes: The International Journal of Systems & Cybernetics, Vol.39, Iss.6, 2010-01, pp. : 1029-1039

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