DC magnetron sputter-deposited tungsten silicide films for microelectronic applications

Author: Hoon Jian-Wei   Chan Kah-Yoong   Tou Teck-Yong  

Publisher: Emerald Group Publishing Ltd

ISSN: 1356-5362

Source: Microelectronics International, Vol.28, Iss.2, 2011-05, pp. : 30-33

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