Author： Lutwyche M. Wada Y.
Publisher： Oxford University Press
ISSN： 0022-0744
Source： Journal of Electron Microscopy, Vol.46, Iss.2, 1997-01, pp. : 161-164
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Abstract
This paper reports the observation of the vacuum tunnelling gap between two conductors of a scanning tunnelling microscope (STM), using a high-resolution transmission electron microscope (TEM). A micromachine scanning tunnelling microscope (μ-STM) is made on a 2.5 mm2 chip, by an advanced ultra-large scale integrated circuit (ULSI) technology with a minimum dimension of 0.4 μm and alignment accuracy of 0.1 μm. The μ-STM is designed to fit into a TEM sample holder for direct observation of the tip apex, and the results demonstrate the possibility of analysing the tunnelling gap physics and material transport mechanisms at the tip apex.
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