3D-observation, HAADF-STEM, eucentric specimen stage, double spherical fulcra, cylindrical specimen, FIB, ZnO particle, Cu metallization, 3D-EDX

Author： Koguchi M

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.50, Iss.3, 2001-05, pp. : 235-241

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