High-resolution transmission electron microscopy and electron energy-loss spectroscopy study of polycrystalline-Si/ZrO 2 /SiO 2 /Si metal-oxide-semiconductor structures

Author： Yang Jun-Mo   Kim Joong Jung   Kim Kyung-Seob   Lee Wan-Gyu   Kawasaki Masahiro  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.55, Iss.1, 2006-01, pp. : 1-5

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