Local lattice parameter determination of a silicon (001) layer grown on a sapphire (11¯02) substrate using convergent-beam electron diffraction

Author: Akaogi Takayuki   Tsuda Kenji   Terauchi Masami   Tanaka Michiyoshi  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.55, Iss.3, 2006-06, pp. : 129-135

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