Influence of a combination of random noise and pattern-edge width (in pixels) on contrast-to-gradient image resolution in scanning electron microscopy

Author: Ishitani Tohru   Sato Mitsugu  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.55, Iss.5, 2006-10, pp. : 253-260

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Abstract