Development of a stage-scanning system for high-resolution confocal STEM

Author: Takeguchi Masaki   Hashimoto Ayako   Shimojo Masayuki   Mitsuishi Kazutaka   Furuya Kazuo  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.57, Iss.4, 2008-08, pp. : 123-127

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Abstract