Fabrication of a TEM sample of ion-irradiated material using focused ion beam microprocessing and low-energy Ar ion milling

Author: Jin Hyung-Ha   Shin Chansun   Kwon Junhyun  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.59, Iss.6, 2010-12, pp. : 463-468

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Abstract