Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. II. Visible Spectrum

Author: Griffiths J. E.   Degenkolb E. O.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.31, Iss.2, 1977-03, pp. : 134-137

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Abstract