Characterization of Thin-Film Negative Resist via Photo-FT-IR

Author： Sommer A. J.   Fuerniss S. J.   Appelt B. K.  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.42, Iss.3, 1988-03, pp. : 460-468

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