High-Sensitivity Infrared Characterization of Ultra-Thin SiO2 Film on Si by Grazing Internal Reflection

Author： Izumitani Junko   Okuyama Masanori   Hamakawa Yoshihiro  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.47, Iss.9, 1993-09, pp. : 1503-1508

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