Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors

Author: You Jianliang   Bhaskar Avinash K.   Packirisamy Muthukumaran   Bhat Rama B.  

Publisher: Inderscience Publishers

ISSN: 1740-8865

Source: International Journal of Intelligent Systems Technologies and Applications, Vol.5, Iss.1-2, 2008-05, pp. : 185-200

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