Subsurface damage measurement in silicon wafers with cross-polarisation confocal microscopy

Author: Lu W.K.   Sun J.G.   Pei Z.J.  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.1, Iss.2, 2007-01, pp. : 272-282

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