FIB micro/nano mould machining process for productivity improvement

Author: Kang Eun-Goo   Kim Jin-Seok   Shin Jeong-Hoon   Choi Hon-Zong   Lee Seok-Woo  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.6, Iss.1-4, 2010-08, pp. : 75-84

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Abstract