Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears

Author： Kurokawa Syuhei Hoga Morihisa Doi Toshiro

Publisher： Inderscience Publishers

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.8, Iss.1-2, 2012-01, pp. : 123-139

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