In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy

Author: Chen Liang-Chia   Yeh Sheng-Lih   Tapilouw Abraham Mario   Lee Kun-Feng  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.8, Iss.1-2, 2012-01, pp. : 40-53

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract