Determination of Impurities in Monoisotopic Silicon Tetrafluoride

Author： Bulanov A. D.   Pimenov V. G.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.40, Iss.7, 2004-07, pp. : 754-759

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Abstract

The impurity contents of different silicon tetrafluoride samples (isotopically unmodified and enriched) are determined by optical emission spectroscopy with the preconcentration of nonvolatile impurities by distilling off SiF4 .

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