Texture of transition-metal boride, nitride, and silicide films produced by ion deposition

Author: Ignatenko P.   Goncharov A.   Terpii D.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.43, Iss.4, 2007-04, pp. : 344-348

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Abstract