Structure and properties of metal nitride films produced by ion implantation

Author: Ignatenko P.   Klyakhina N.   Badekin M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.41, Iss.1, 2005-01, pp. : 36-41

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Abstract