Tungsten thin-film deposition on a silicon wafer: The formation of silicides at W-Si interface

Author: Plyushcheva S.   Mikhailov G.   Shabel’nikov L.   Shapoval S.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.45, Iss.2, 2009-02, pp. : 140-144

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