New method for the Langmuir probe diagnostics of polymerizing plasmas

Author: Rudenko K.   Myakon’kikh A.   Orlikovsky A.   Pustovit A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.36, Iss.1, 2007-02, pp. : 14-26

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Abstract