Phosphomolybdic acid-assisted thermal oxidation of GaAs

Author: Mittova I.   Lavrushina S.   Lebedeva E.   Popelo A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.36, Iss.3, 2007-05, pp. : 159-163

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