Parameters and composition of HBr plasma under the conditions of glow DC discharge

Author: Smirnov A.   Efremov A.   Svettsov V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.39, Iss.6, 2010-11, pp. : 418-426

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Abstract