Ion beam synthesis of aluminium nitride: characterisation of thin AIN layers formed in microelectronics aluminium

Author: Calvo-Barrio L.   Pérez-Rodríguez A.   Romano-Rodríguez A.   Morante J. R.   Montserrat J.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.11, 1995-11, pp. : 1187-1190

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Abstract