Detailed computer simulation of ion implantation processes into crystals

Author： Arias J.   Jaraiz M.   Rubio J. E.   Pelaz L.   Marqués L. A.   Barbolla J.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.11, Iss.11, 1995-11, pp. : 1191-1193

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