Electrical activity of extended defects and gettering of metallic impurities in silicon

Author: Kusanagi S.   Sekiguchi T.   Shen B.   Sumino K.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.7, 1995-07, pp. : 682-690

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Abstract