Platinum gettering in silicon: precipitation of PtSi on diffusion induced dislocations and on SiP precipitates

Author： Correia A.   Pichaud B.   Lhorte A.   Quoirin J. B.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.11, Iss.7, 1995-07, pp. : 691-695

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