Effect of Si target sputtering power on diffusion barrier properties of Ta–Si–N thin films

Author： Zhou J. C.   Liu Z.   Li Y. Z.   Luo D. T.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.25, Iss.3, 2009-03, pp. : 419-424

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