Shortlisted substrate ion etching in combined steered cathodic arc–ubm deposition system: effects on interface architecture, adhesion, and tool performance

Author： Schönjahn C.   Lewis D.B.     Petrov I.  

Publisher： Maney Publishing

ISSN： 1743-2944

Source： Surface Engineering, Vol.16, Iss.2, 2000-04, pp. : 176-180

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