Morphological investigation of aluminium nitride films on various substrates for MEMS applications

Author： Kar J. P.   Bose G.   Tuli S.   Myoung J. M.   Mukherjee S.  

Publisher： Maney Publishing

ISSN： 1743-2944

Source： Surface Engineering, Vol.25, Iss.7, 2009-10, pp. : 526-530

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