KINETICS AND MECHANISMS OF TiN CHEMICAL VAPOUR DEPOSITION IN Ti-CI-H-N SYSTEM

Author: Rong Cao Zhi   Sheng Du Yuan   Fang Miao Hue  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.5, Iss.4, 1989-01, pp. : 315-322

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Abstract