Processing, microstructure and properties of chemical vapour deposited TiN/AIN films

Author： Yoshikawa Noboru   Aoki Masato   Kikuchi Atsushi   Taniguchi Shoji  

Publisher： Inderscience Publishers

ISSN： 0268-1900

Source： International Journal of Materials and Product Technology, Vol.16, Iss.1-2, 2004-10, pp. : 109-116

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