Variation of thin film deposition rate on SS 314 with the variation of gas flow rate using CVD

Author： Chowdhury Mohammad Asaduzzaman Nuruzzaman Dewan Muhammad Khalil Md. Khaled Rahaman Mohammad Lutfar

ISSN： 0036-8792

Source： Industrial Lubrication and Tribology, Vol.63, Iss.6, 2011-09, pp. : 433-439

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