Surface recombination of oxygen atoms in O2 plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes

Author： Lopaev D V   Malykhin E M   Zyryanov S M  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.44, Iss.1, 2011-01, pp. : 15201-15212

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