Surface recombination of oxygen atoms in O₂ plasma at increased pressure: II. Vibrational temperature and surface production of ozone

Author： Lopaev D V Malykhin E M Zyryanov S M

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.44, Iss.1, 2011-01, pp. : 15202-15217

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