Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber

Author: Takahashi Kazunori   Itoh Yuki   Fujiwara Tamiya  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.44, Iss.1, 2011-01, pp. : 15204-15208

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Abstract