Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices

Author： Singh R A   Satyanarayana N   Kustandi T S   Sinha S K  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.44, Iss.1, 2011-01, pp. : 15301-15310

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