The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

Author: Anders A   Čapek J   Hála M   Martinu L  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.45, Iss.1, 2012-01, pp. : 12003-12007

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Abstract