The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

Author： Anders A   Čapek J   Hála M   Martinu L  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.45, Iss.1, 2012-01, pp. : 12003-12007

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