Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method

Author: Feng Can   Kajima Mariko   Gonda Satoshi   Minoshima Kaoru   Fujimoto Hiroyuki   Zeng Lijiang  

Publisher: IOP Publishing

ISSN: 0026-1394

Source: Metrologia, Vol.49, Iss.3, 2012-06, pp. : 236-244

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Abstract